In situ analysis of surface photoabsorption spectra during InP ALE in metal organic chemical vapor deposition

• 作者Young Dong Kim; Min Soo Lee; Tae-Wan Lee; Heedon Hwang; Sukho Yoon; Youngboo Moon; Euijoon Yoon
• 印刷ISSN0167-9317
• 文件大小182.16KB
• 发表时间2000
• DOI10.1016/s0167-9317(99)00459-1
• 页码43-50