Limitations of conductance to the measurement of the interface state density of MOS capacitors with tunneling gate dielectrics
Vogel, E.M.; Henson, W.K.; Richter, C.A.; Suehle, J.S.
- 作者Vogel, E.M.; Henson, W.K.; Richter, C.A.; Suehle, J.S.
- 卷第47卷
- 期第3期
- 印刷ISSN0018-9383
- 电子ISSN1557-9646
- 文件大小200.56KB
- 发表时间2000
- DOI10.1109/16.824736
- 页码601-608