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Effect of the substrate on the structural properties of low temperature microcrystalline silicon films – a Raman spectroscopy and atomic force microscopy investigation

Effect of the substrate on the structural properties of low temperature microcrystalline silicon films – a Raman spectroscopy and atomic force microscopy investigation

E.A.T Dirani; A.M Andrade; L.K Noda; F.J Fonseca; P.S Santos

作者E.A.T Dirani; A.M Andrade; L.K Noda; F.J Fonseca; P.S Santos
卷第273卷
印刷ISSN0022-3093
文件大小1120.86KB
发表时间2000
DOI10.1016/s0022-3093(00)00177-0

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