SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Materials and Device Characterization in Micromachining III - Development of a high-performance SOI-fabricated gyroscope
- 作者Rajendran, S.; Liew, Kim M.; Loke, Yee C.; Liu, Ai Q.; Vladimirsky, Yuli; Coane, Philip J.
- 卷第4175卷
- 印刷ISSN0277-786X
- 文件大小402.27KB
- 发表时间2000
- DOI10.1117/12.395603
- 页码158-167