Handbook of Advanced Plasma Processing Techniques || Mass Spectrometric Characterization of Plasma Etching Processes
Shul, Randy J.; Pearton, Stephen J.
- 作者Shul, Randy J.; Pearton, Stephen J.
- 文件大小5311.41KB
- 发表时间2000
- DOI10.1007/978-3-642-56989-0_6
- 页码205-256