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Measurements of the electron energy distribution function in molecular gases in a shielded inductively coupled plasma

Measurements of the electron energy distribution function in molecular gases in a shielded inductively coupled plasma

Singh, Harmeet; Graves, David B.

期刊名称Journal of Applied Physics
作者Singh, Harmeet; Graves, David B.
卷第88卷
期第7期
印刷ISSN0021-8979
文件大小384.39KB
发表时间2000
DOI10.1063/1.1290450

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