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[IEEE IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems - Miyazaki, Japan (23-27 Jan. 2000)] Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) - Ultrasonically driven surface micromachined motor

[IEEE IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems - Miyazaki, Japan (23-27 Jan. 2000)] Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) - Ultrasonically driven surface micromachined motor

Kaajakari, V.; Rodgers, S.; Lal, A.

作者Kaajakari, V.; Rodgers, S.; Lal, A.
文件大小793.78KB
发表时间2000
DOI10.1109/memsys.2000.838487
页码40-45

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