[IEEE ICSE2000. 2000 IEEE International Conference on Semiconductor Electronics. - Guoman Port Dickson Resort, Malaysia (13-15 Nov. 2000)] ICSE 2000. 2000 IEEE International Conference on Semiconductor Electronics. Proceedings (Cat. No.00EX425) - Growth study of wide bandgap a-Si:H and a-SiN:H by PECVD method for application in thin film transistor
Jasruddin, ; Wenas, W.W.; Winata, T.; Barmawi, M.
- 作者Jasruddin, ; Wenas, W.W.; Winata, T.; Barmawi, M.
- 文件大小283.32KB
- 发表时间2000
- DOI10.1109/smelec.2000.932472
- 页码245-248