Optimal predictive control with constraints for the processing of semiconductor wafers on bake plates
- 期刊名称IEEE Transactions on Semiconductor Manufacturing
- 作者Weng Khuen Ho, ; Tay, A.; Schaper, C.D.
- 卷第13卷
- 期第1期
- 印刷ISSN0894-6507
- 文件大小278.82KB
- 发表时间2000
- DOI10.1109/66.827348
- 页码88-96
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