Dwell-time related effects in focused ion beam synthesis of cobalt disilicide
- 期刊名称Journal of Applied Physics
- 作者Hausmann, Stephan; Bischoff, Lothar; Teichert, Jochen; Voelskow, Matthias; Möller, Wolfhard
- 卷第87卷
- 期第1期
- 印刷ISSN0021-8979
- 文件大小651.15KB
- 发表时间2000
- DOI10.1063/1.371826
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