Diffusion barrier and electrical characteristics of a self-aligned MgO layer obtained from a Cu(Mg) alloy film
- 期刊名称Applied Physics Letters
- 作者Lee, W. H.; Cho, H. L.; Cho, B. S.; Kim, J. Y.; Nam, W. J.; Kim, Y-S.; Jung, W. G.; Kwon, H.; Lee, J. H.; Lee, J. G.; Reucroft, P. J.; Lee, C. M.; Lee, E. G.
- 卷第77卷
- 期第14期
- 印刷ISSN0003-6951
- 文件大小292.40KB
- 发表时间2000
- DOI10.1063/1.1314879
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