Development of plasma chemical vaporization machining
- 期刊名称Review of Scientific Instruments
- 作者Mori, Yuzo; Yamauchi, Kazuto; Yamamura, Kazuya; Sano, Yasuhisa
- 卷第71卷
- 期第12期
- 印刷ISSN0034-6748
- 文件大小472.33KB
- 发表时间2000
- DOI10.1063/1.1322581
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