Recrystallization and electrical properties of MeV P implanted 6H–SiC
- 期刊名称Journal of Applied Physics
- 作者Harada, Shinsuke; Motooka, Teruaki
- 卷第87卷
- 期第5期
- 印刷ISSN0021-8979
- 文件大小362.42KB
- 发表时间2000
- DOI10.1063/1.372234
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