Structural and Morphological Characterization of Al/Ti-Based Ohmic Contacts on p-Type 4H-SiC Annealed Under Various Conditions

• 期刊名称Materials Science Forum
• 作者Vassilevski, Konstantin V.; Zekentes, K.; Constantinidis, G.; Papanicolaou, N.; Nikitina, Irina P.; Babanin, A.I.
• 电子ISSN1662-9752
• 文件大小386.76KB
• 发表时间2000
• DOI10.4028/www.scientific.net/MSF.338-342.1017
• 页码1017-1020