Al and Al/C High Dose Implantation in 4H-SiC
Bluet, Jean Marie; Pernot, Julien; Billon, Thierry; Contreras, Sylvie; Michaud, J.F.; Robert, Jean-Louis; Camassel, Jean
- 期刊名称Materials Science Forum
- 作者Bluet, Jean Marie; Pernot, Julien; Billon, Thierry; Contreras, Sylvie; Michaud, J.F.; Robert, Jean-Louis; Camassel, Jean
- 电子ISSN1662-9752
- 文件大小376.86KB
- 发表时间2000
- DOI10.4028/www.scientific.net/MSF.338-342.885
- 页码885-888