On the plasma parameters of a planar inductive oxygen discharge
- 期刊名称Journal of Physics D: Applied Physics
- 作者Gudmundsson, J T; Marakhtanov, A M; Patel, K K; Gopinath, V P; Lieberman, M A
- 卷第33卷
- 期第11期
- 印刷ISSN0022-3727
- 电子ISSN1361-6463
- 文件大小171.73KB
- 发表时间2000-06-07
- DOI10.1088/0022-3727/33/11/311
- 页码1323-1331
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