Evaluation of cleaning efficiency with a radioactive tracer and development of a microwave digestion method for semiconductor processes

• 作者June-Kuen Lu; Fu-Hsiang Ko; Tieh-Chi Chu; Yuh-Chang Sun; Mei-Ya Wang; Tien-Ko Wang
• 卷第407卷
• 印刷ISSN0003-2670
• 文件大小94.18KB
• 发表时间2000
• DOI10.1016/s0003-2670(99)00818-1
• 页码291-300