Recent progress in thin film growth analysis by multichannel spectroscopic ellipsometry

• 作者R.W Collins; Joohyun Koh; H Fujiwara; P.I Rovira; A.S Ferlauto; J.A Zapien; C.R Wronski; R Messier
• 印刷ISSN0169-4332
• 文件大小392.94KB
• 发表时间2000
• DOI10.1016/s0169-4332(99)00482-1
• 页码217-228