Effect of oxygen on residual stress and structural properties of tungsten nitride films grown by reactive magnetron sputtering

• 作者Y.G Shen; Y.W Mai
• 卷第76卷
• 期第2期
• 印刷ISSN0921-5107
• 文件大小769.37KB
• 发表时间2000
• DOI10.1016/s0921-5107(00)00424-4
• 页码107-115