Transmission electron microscopy investigations of the formation of macropores in n- and p-Si(001)/(111)

• 作者C Jäger; B Finkenberger; W Jäger; M Christophersen; J Carstensen; H Föll
• 印刷ISSN0921-5107
• 文件大小985.09KB
• 发表时间2000
• DOI10.1016/s0921-5107(99)00264-0
• 页码199-204