[IEEE 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 - Alpbach, Austria (17-22 Sept. 2000)] 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) - Simulation of ultra-low energy ion implantation from a remote plasma source using Monte Carlo techniques
- 作者Puchner, H.; Sukharev, V.; Aronowitz, S.
- 文件大小375.96KB
- 发表时间2000
- DOI10.1109/iit.2000.924130
- 页码224-227
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