Impact of Boron and Gallium on Defects Production in Silicon

Khan, Aurangzeb; Dharmarasu, Nethaji; Yamaguchi, Masafumi; Araki, Kenji; Vu, Tuong K.; Saga, Tatsuo; Abe, Takao; Annzawa, Osamu; Imaizumi, M.; Matsuda, Sumio

期刊名称MRS Proceedings
作者Khan, Aurangzeb; Dharmarasu, Nethaji; Yamaguchi, Masafumi; Araki, Kenji; Vu, Tuong K.; Saga, Tatsuo; Abe, Takao; Annzawa, Osamu; Imaizumi, M.; Matsuda, Sumio
卷第647卷
电子ISSN1946-4274
文件大小225.85KB
发表时间2000-1
DOI10.1557/proc-647-o14.7/r9.7

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Impact of Boron and Gallium on Defects Production in Silicon