SPIE Proceedings [SPIE Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS - Paris, France (Tuesday 9 May 2000)] Design, Test, Integration, and Packaging of MEMS/MOEMS - MEMS IC test probe utilizing fritting contacts
- 作者Itoh, Toshihiro; Kataoka, Kenichi; Engelmann, Gunter; Wolf, Juergen; Ehrmann, Oswin; Reichl, Herbert; Suga, Tadatomo; Courtois, Bernard; Crary, Selden B.; Gabriel, Kaigham J.; Karam, Jean Michel; Markus, Karen W.; Tay, Andrew A. O.
- 卷第4019卷
- 印刷ISSN0277-786X
- 文件大小327.25KB
- 发表时间2000
- DOI10.1117/12.382300
- 页码244-249
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