Electrical Characterization of Ultrashallow Dopant Profiles
- 期刊名称Journal of The Electrochemical Society
- 作者Clarysse, T.; Vandervorst, W.; Collart, E. J. H.; Murrell, A. J.
- 卷第147卷
- 期第9期
- 印刷ISSN0013-4651
- 文件大小165.88KB
- 发表时间2000
- DOI10.1149/1.1393940
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