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[Univ. Tehran ICM 2000. Proceedings of the 12th International Conference on Microelectronics - Tehran, Iran (31 Oct.-2 Nov. 2000)] ICM 2000. Proceedings of the 12th International Conference on Microelectronics. (IEEE Cat. No.00EX453) - Passivation of lattice defects in silicon by electron cyclotron resonance hydrogenation technique

[Univ. Tehran ICM 2000. Proceedings of the 12th International Conference on Microelectronics - Tehran, Iran (31 Oct.-2 Nov. 2000)] ICM 2000. Proceedings of the 12th International Conference on Microelectronics. (IEEE Cat. No.00EX453) - Passivation of lattice defects in silicon by electron cyclotron resonance hydrogenation technique

Keshmiri, S.H.

作者Keshmiri, S.H.
文件大小299.40KB
发表时间2000
DOI10.1109/icm.2000.916445
页码205-208

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