Electrical characteristics of silicon-nodule-related via failures observed in aluminum-silicon interconnects
- 作者Manabu Itsumi; Shin-ichi Ohfuji; Hideo Akiya; Satoshi Nakayama; Hideo Yoshino
- 卷第4卷
- 期第3期
- 印刷ISSN1432-8488
- 电子ISSN1433-0768
- 文件大小143.96KB
- 发表时间2000-02
- DOI10.1007/s100080050009
- 页码125-130
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