Depth profiling of hydrogen in crystalline silicon using elastic recoil detection analysis

R.D. Verda; C.J. Maggiore; J.R. Tesmer; A. Misra; T. Hoechbauer; M. Nastasi; R.W. Bower

作者R.D. Verda; C.J. Maggiore; J.R. Tesmer; A. Misra; T. Hoechbauer; M. Nastasi; R.W. Bower
卷第183卷
印刷ISSN0168-583X
文件大小256.01KB
发表时间2001
DOI10.1016/s0168-583x(01)00635-8
页码401-412

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