Interlayer Mediated Epitaxy of Cobalt Silicide on Silicon (100) from Low Temperature Chemical Vapor Deposition of Cobalt Formation Mechanisms and Associated Properties
Londergan, Ana R.; Nuesca, Guillermo; Goldberg, Cindy; Peterson, Gregory; Kaloyeros, Alain E.; Arkles, Barry; Sullivan, John J.
- 期刊名称Journal of The Electrochemical Society
- 作者Londergan, Ana R.; Nuesca, Guillermo; Goldberg, Cindy; Peterson, Gregory; Kaloyeros, Alain E.; Arkles, Barry; Sullivan, John J.
- 卷第148卷
- 期第1期
- 印刷ISSN0013-4651
- 文件大小789.68KB
- 发表时间2001
- DOI10.1149/1.1344535