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Gettering simulator: physical basis and algorithm

Gettering simulator: physical basis and algorithm

Hieslmair, H; Balasubramanian, S; Istratov, A A; Weber, E R

期刊名称Semiconductor Science and Technology
作者Hieslmair, H; Balasubramanian, S; Istratov, A A; Weber, E R
卷第16卷
期第7期
印刷ISSN0268-1242
电子ISSN1361-6641
文件大小122.61KB
发表时间2001-07-01
DOI10.1088/0268-1242/16/7/307
页码567-574

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