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Hybrid model for the calculation of ion distribution functions behind a direct current or radio frequency driven plasma boundary sheath

Hybrid model for the calculation of ion distribution functions behind a direct current or radio frequency driven plasma boundary sheath

Kratzer, Matthias; Brinkmann, Ralf Peter; Sabisch, Winfried; Schmidt, Harald

期刊名称Journal of Applied Physics
作者Kratzer, Matthias; Brinkmann, Ralf Peter; Sabisch, Winfried; Schmidt, Harald
卷第90卷
期第5期
印刷ISSN0021-8979
文件大小346.66KB
发表时间2001
DOI10.1063/1.1389081

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