Specular spectroscopic scatterometry
- 期刊名称IEEE Transactions on Semiconductor Manufacturing
- 作者Xinhui Niu, ; Jakatdar, N.; Junwei Bao, ; Spanos, C.J.
- 卷第14卷
- 期第2期
- 印刷ISSN0894-6507
- 文件大小377.20KB
- 发表时间2001-5
- DOI10.1109/66.920722
- 页码97-111
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