Minimum time control of conductive heating systems for microelectronics processing

• 期刊名称IEEE Transactions on Semiconductor Manufacturing
• 作者Tay, A.; Weng Khuen Ho, ; Young Peng Poh,
• 卷第14卷
• 期第4期
• 印刷ISSN0894-6507
• 文件大小92.29KB
• 发表时间2001
• DOI10.1109/66.964325
• 页码381-386