发现好书期刊，享受阅读乐趣

海量图书期刊资源，随时随地畅享阅读乐趣

[IEEE Proceedings of the IEEE 2001 International Interconnect Technology Conference - Burlingame, CA, USA (2001.06.6-2001.06.6)] Proceedings of the IEEE 2001 International Interconnect Technology Conference (Cat. No.01EX461) - Step coverage and continuity of an I-PVD Ta(N) barrier layer: limitations

[IEEE Proceedings of the IEEE 2001 International Interconnect Technology Conference - Burlingame, CA, USA (2001.06.6-2001.06.6)] Proceedings of the IEEE 2001 International Interconnect Technology Conference (Cat. No.01EX461) - Step coverage and continuity of an I-PVD Ta(N) barrier layer: limitations

Tokei, Z.; McInerney, D.; Baklanov, M.; Beyer, G.P.; Maex, K.
  • 作者Tokei, Z.; McInerney, D.; Baklanov, M.; Beyer, G.P.; Maex, K.
  • 文件大小433.49KB
  • 发表时间2001
  • DOI10.1109/iitc.2001.930064
  • 页码213-215
同期刊推荐
← 返回【学霸图书馆】主页
© 2026 学霸图书馆 · 让阅读成为习惯