Improvement of hydrogenated amorphous silicon properties with increasing contribution of SiH[sub 3] to film growth

Kessels, W. M. M.; Boogaarts, M. G. H.; Hoefnagels, J. P. M.; Schram, D. C.; van de Sanden, M. C. M.

期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
作者Kessels, W. M. M.; Boogaarts, M. G. H.; Hoefnagels, J. P. M.; Schram, D. C.; van de Sanden, M. C. M.
卷第19卷
期第3期
印刷ISSN0734-2101
文件大小331.65KB
发表时间2001
DOI10.1116/1.1365131

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