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[IEEE ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics - Honolulu, HI, USA (21 July-2 Aug. 2000)] ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics (IEEE Cat. No.00CH37076) - Highly c-axis oriented AlN films deposited on LiNbO/sub 3/ substrates for surface acoustic wave devices

[IEEE ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics - Honolulu, HI, USA (21 July-2 Aug. 2000)] ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics (IEEE Cat. No.00CH37076) - Highly c-axis oriented AlN films deposited on LiNbO/sub 3/ substrates for surface acoustic wave devices

Chien-Chuan Cheng, ; Kuo-Sheng Kao, ; Ying-Chung Chen,
  • 作者Chien-Chuan Cheng, ; Kuo-Sheng Kao, ; Ying-Chung Chen,
  • 卷第1卷
  • 文件大小328.13KB
  • 发表时间2001
  • DOI10.1109/isaf.2000.941591
  • 页码439-442
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