发现好书期刊，享受阅读乐趣

海量图书期刊资源，随时随地畅享阅读乐趣

Particle Removal Efficiency Evaluation at 40 nm Using Haze Particle Standard

Yoo, Seong Ho; Liu, Benjamin Y.H.; Sun, James; Narayanswami, Natraj; Thomes, Gregory P.

期刊名称Solid State Phenomena
作者Yoo, Seong Ho; Liu, Benjamin Y.H.; Sun, James; Narayanswami, Natraj; Thomes, Gregory P.
电子ISSN1662-9779
文件大小333.91KB
发表时间2001
DOI10.4028/www.scientific.net/SSP.76-77.259
页码259-262