Effects of TiN Deposition on the Characteristics of W/TiN/SiO[sub 2]/Si Metal Oxide Semiconductor Capacitors
- 期刊名称Journal of The Electrochemical Society
- 作者Park, Dae-Gyu; Cho, Heung-Jae; Lim, Kwan-Yong; Cha, Tae-Ho; Yeo, In-Seok; Park, Jin Won
- 卷第148卷
- 期第9期
- 印刷ISSN0013-4651
- 文件大小192.84KB
- 发表时间2001
- DOI10.1149/1.1392322
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