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Instantaneous phase shifting arrangement for microsurface profiling of flat surfaces

Instantaneous phase shifting arrangement for microsurface profiling of flat surfaces

B.K.A. Ngoi; K. Venkatakrishnan; N.R. Sivakumar; T. Bo

作者B.K.A. Ngoi; K. Venkatakrishnan; N.R. Sivakumar; T. Bo
卷第190卷
印刷ISSN0030-4018
文件大小276.39KB
发表时间2001
DOI10.1016/s0030-4018(01)01068-9
页码109-116

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