Impact of post via-etch cleans on mechanical reliability of W-plug vias
- 作者Y.S. Obeng; S.H. Kang; J.S. Huang; A.S. Oates; X. Lin; J.S. Obeng
- 卷第391卷
- 期第1期
- 印刷ISSN0040-6090
- 文件大小840.83KB
- 发表时间2001
- DOI10.1016/s0040-6090(01)00906-3
- 页码149-156
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