Microstructural properties of amorphous carbon nitride films synthesised by dc magnetron sputtering
- 作者A.G Fitzgerald; Liudi Jiang; M.J Rose; T.J Dines
- 印刷ISSN0169-4332
- 文件大小147.12KB
- 发表时间2001
- DOI10.1016/s0169-4332(01)00107-6
- 页码525-530
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