Characterization of the surface layer of GaAs nitrided by high-density plasma
- 作者Kanji Yasui; Yuko Tsukada; Tatsuro Arayama; Satoshi Okutani; Tadashi Akahane
- 印刷ISSN0169-4332
- 文件大小152.52KB
- 发表时间2001
- DOI10.1016/s0169-4332(01)00166-0
- 页码585-590
海量图书期刊资源，随时随地畅享阅读乐趣