Properties of Large Grain-Size poly-Si Films by Catalytic Chemical Sputtering
- 期刊名称MRS Proceedings
- 作者Masuda, Atsushi; Kamesaki, Koji; Izumi, Akira; Matsumura, Hideki
- 卷第664卷
- 电子ISSN1946-4274
- 文件大小2665.01KB
- 发表时间2001-1
- DOI10.1557/proc-664-a4.5
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