Relationships Between Microstructure and Reliability in Pzt Mems

• 期刊名称MRS Proceedings
• 作者Olson, B.W.; Randall, L.M.; Richards, C.D.; Richards, R.F.; Bahr, D.F.
• 卷第666卷
• 电子ISSN1946-4274
• 文件大小2524.47KB
• 发表时间2001-1
• DOI10.1557/proc-666-f6.1