Enhanced Low-Temperature Crystallization of Amorphous Si Films Using AlCl3 Vapor
- 期刊名称MRS Proceedings
- 作者Ahn, Jin Hyung; Eom, Ji Hye; Ahn, Byung Tae
- 卷第685卷
- 电子ISSN1946-4274
- 文件大小1970.02KB
- 发表时间2001-1
- DOI10.1557/proc-685-d5.19.1
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