Improvement of charge minority-carrier lifetime in p(boron)-type Czochralski silicon by rapid thermal annealing
- 作者Ji Youn Lee; Stefan Peters; Stefan Rein; Stefan W. Glunz
- 卷第9卷
- 期第6期
- 印刷ISSN1062-7995
- 电子ISSN1099-159X
- 文件大小114.49KB
- 发表时间2001
- DOI10.1002/pip.394
- 页码417-424