发现好书期刊,享受阅读乐趣

海量图书期刊资源,随时随地畅享阅读乐趣

SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] Device and Process Technologies for MEMS and Microelectronics II - <title>MEMS applications of porous silicon</title>

SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] Device and Process Technologies for MEMS and Microelectronics II - MEMS applications of porous silicon

Benecke, Wolfgang; Splinter, Alexandra; Chiao, Jung-Chih; Faraone, Lorenzo; Harrison, H. Barry; Shkel, Andrei M.
  • 作者Benecke, Wolfgang; Splinter, Alexandra; Chiao, Jung-Chih; Faraone, Lorenzo; Harrison, H. Barry; Shkel, Andrei M.
  • 卷第4592卷
  • 印刷ISSN0277-786X
  • 文件大小547.06KB
  • 发表时间2001
  • DOI10.1117/12.449009
  • 页码76-87
← 返回【学霸图书馆】主页