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SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] Device and Process Technologies for MEMS and Microelectronics II - <title>Thick resist for MEMS processing</title>

SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] Device and Process Technologies for MEMS and Microelectronics II - Thick resist for MEMS processing

Brown, Joe; Hamel, Clifford; Chiao, Jung-Chih; Faraone, Lorenzo; Harrison, H. Barry; Shkel, Andrei M.
  • 作者Brown, Joe; Hamel, Clifford; Chiao, Jung-Chih; Faraone, Lorenzo; Harrison, H. Barry; Shkel, Andrei M.
  • 卷第4592卷
  • 印刷ISSN0277-786X
  • 文件大小658.31KB
  • 发表时间2001
  • DOI10.1117/12.448985
  • 页码334-346
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