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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] Reliability, Testing, and Characterization of MEMS/MOEMS - <title>MEMS reliability, characterization, and test</title>

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] Reliability, Testing, and Characterization of MEMS/MOEMS - MEMS reliability, characterization, and test

Hartzell, Allyson L.; Woodilla, David J.; Ramesham, Rajeshuni

作者Hartzell, Allyson L.; Woodilla, David J.; Ramesham, Rajeshuni
卷第4558卷
印刷ISSN0277-786X
文件大小465.44KB
发表时间2001
DOI10.1117/12.442987
页码1-5

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