SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] Device and Process Technologies for MEMS and Microelectronics II - Materials and reliability issues in MEMS and microsystems
- 作者Christou, Aristos; Chiao, Jung-Chih; Faraone, Lorenzo; Harrison, H. Barry; Shkel, Andrei M.
- 卷第4592卷
- 印刷ISSN0277-786X
- 文件大小76.37KB
- 发表时间2001
- DOI10.1117/12.448984
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