SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] BioMEMS and Smart Nanostructures - Nanoscale phosphorous atom arrays created using STM for the fabricaton of a silicon-based quantum computer

O'Brien, J. L.; Schofield, S. R.; Simmons, M. Y.; Clark, Robert G.; Dzurak, Andrew S.; Curson, N. J.; Kane, Bruce E.; McAlpine, N. S.; Hawley, Marilyn E.; Brown, Geoffrey W.; Kish, Laszlo B.; Harvey, Erol C.; Spillman, Jr., William B.

作者O'Brien, J. L.; Schofield, S. R.; Simmons, M. Y.; Clark, Robert G.; Dzurak, Andrew S.; Curson, N. J.; Kane, Bruce E.; McAlpine, N. S.; Hawley, Marilyn E.; Brown, Geoffrey W.; Kish, Laszlo B.; Harvey, Erol C.; Spillman, Jr., William B.
卷第4590卷
印刷ISSN0277-786X
文件大小1847.28KB
发表时间2001
DOI10.1117/12.454617
页码299-309

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SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] BioMEMS and Smart Nanostructures - Nanoscale phosphorous atom arrays created using STM for the fabricaton of a silicon-based quantum computer